FEI Quanta 600 FE-SEM
The Quanta 600 FEG is a field emission scanning electron microscope capable of generating and collecting high-resolution and low-vacuum images. It is equipped with a motorized x-y-z-tilt-rotate stage, providing the following movements:
x = y = 150 mm (motorized);
z = 65 mm (motorized);
Tilt +70 degrees to –5 degrees (motorized);
Source Field emission gun assembly with Schottky emitter source.
Voltage 200 V to 30 kV
Beam Current >100 nA
Resolution (measured as gold particle separation on a carbon substrate)
- 1.2 nm at 30 kV (SE)
-2.5 nm at 30 kV (BSE)
-3.0 nm at 1 kV (SE)
- 1.5 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 1 kV (SE)
Focus Range 2.5 – 99 mm
Magnification 7x (at longest working distance) to >2,000,000x in single quadrant view of the Quanta user interface on a 19” LCD monitor
Field of View Identical field of view in high- and low-vacuum modes (17 mm at the longest working distance)
500 µm with standard, axial, gaseous secondary electron (SE) detector
The Quanta 600 FEG is controlled from an MS-Windows XP graphical user interface and images can be saved in TIFF, BMP, JPEG or AVI file formats, and in 8-bit or 16-bit depth, to the hard disk.
Equipment associated with the Quanta 600 includes: conventional Everhart-Thornley detector, back-scattered electron detector, IR-CCD chamber camera, Oxford EDS system equipped with X-ray mapping and digital imaging, HKL/Oxford EBSD system incl. geological phase database for phase ID, Gatan panchromatic cathodoluminescence detector with RGB filters and a Zyvex S100 nanomanipulator.