FEI Quanta 600 FE-SEM


The Quanta 600 FEG is a field emission scanning electron microscope capable of generating and collecting high-resolution and low-vacuum images.  It is equipped with a motorized x-y-z-tilt-rotate stage, providing the following movements:

        x = y = 150 mm (motorized);

        z = 65 mm (motorized);

        Tilt +70 degrees to –5 degrees (motorized);

Source          Field emission gun assembly with Schottky emitter source.

Voltage         200 V to 30 kV

Beam Current     >100 nA

Resolution   (measured as gold particle separation on a carbon substrate)


               - 1.2 nm at 30 kV (SE)

                -2.5 nm at 30 kV (BSE)

                -3.0 nm at 1 kV (SE)


                - 1.5 nm at 30 kV (SE)

                - 2.5 nm at 30 kV (BSE)

                - 3.0 nm at 1 kV (SE)

Focus Range      2.5 – 99 mm

Magnification      7x (at longest working distance) to >2,000,000x in single quadrant view of the Quanta user interface on a 19” LCD monitor

Field of View       Identical field of view in high- and low-vacuum modes (17 mm at the longest working distance)

                        500 µm with standard, axial, gaseous secondary electron (SE) detector

The Quanta 600 FEG is controlled from an MS-Windows XP graphical user interface and images can be saved in TIFF, BMP, JPEG or AVI file formats, and in 8-bit or 16-bit depth, to the hard disk.


Equipment associated with the Quanta 600 includes: conventional Everhart-Thornley detector, back-scattered electron detector, IR-CCD chamber camera, Oxford EDS system equipped with X-ray mapping and digital imaging, HKL/Oxford EBSD system incl. geological phase database for phase ID, Gatan panchromatic cathodoluminescence detector with RGB filters and a Zyvex S100 nanomanipulator.