Capabilities:

Investigation of non-conductive samples is possible in the variable pressure mode and the Oxford EDS detector allows for the characterization of elements in a sample. Surface Texture/roughness, surface profilometry from stereo (stage-tilt or beam tilt) image pairs, using Alicona MeX software.

Specifications:

Source: Tungsten thermionic emission system

Voltage: 200eV-30keV

Beam Current: 1pA to 2µA

Resolution:

• High Vacuum secondary electron:
  • 3nm at 30keV
  • 8nm at 3keV
• Low Vacuum backscattered electron and Low Vacuum Secondary Electron TESCAN detector:
  • 3.5nm at 30keV

Magnification: 1x-1,000,000

Field of View: 7.7mm at 10mmWD, 24mm at 30mm WD

Stage: Large analytical chamber with a fully 5-axis motorized stage

• x=y=130mm
• z=100mm
• Tilt=-30° to +90°

Image Size:

• 16384 x 16384 pixels, adjustable separately for live image (in 3 steps) and for stored images (11 steps)
• Selectable square or 4:3 or 2:1 rectangle
• Unlimited large panorama image size (up to storage capacity)

Equipment associated with the Vega includes: SE detector, retractable BSE detector, low vacuum secondary electron TESCAn detector, pA meter, touch alarm, and IR TV camera.

Electron optics working modes:

• High vacuum mode: includes resolution, depth, field, wide field, and channeling.
• Low vacuum mode: includes resolution and depth.

For imaging services, training, and questions

please contact Dr. Stanislav Vitha, stanvitha@tamu.edu

Instructions and Other Useful Information

How is the training done:  Tescan_Vega_Training_Policy.pdf

Download the Startup/Operation/Exit Procedures

Using the MIC? Please cite us by our Research Resource ID: RRID: SCR_022128