SEM Short Course
This short course covers the principles of SEM imaging and EDS/EBSD analysis. This course would be beneficial to those who are just starting with SEM imaging, those who have experience but feel that they lack a grasp of the basic understanding of the techniques, or those who would like to know more about the capabilities of SEM instruments.
Students may submit ONE of their own samples in advance, by Monday October 23rd, MIC staff will perform sample preparation so that their sample is ready for the practical session. Note: Before bringing your sample, you must contact Stanislav Vitha, stanvitha@tamu.edu, to confirm the sample is suitable for SEM.
Lectures/Presentations:
- Basic principles of SEM: Interactions of electron beam with the sample, types of signals commonly used in SEM (SE, BSE, CL, X-Ray); SEM Design, vacuum system, electron sources, effects of accelerating voltage on resolution, charging, depth, contrast.
- Analytical SEM : EDS, EBSD – principles, applications, examples
- SEM of non-conductive samples, environmental SEM, Variable pressure SEM
- Cryo-SEM, FIB, 3D SEM imaging
- SEM in surface characterization, texture/roughness analysis, sterogrammetry
- Principles of sample preparation for SEM
Practical, hands-on session Tuesday October 31 OR Wednesday, November 1, 9am-12pm
- Mounting and sputter coating of samples
- Basic operation of Tescan Vega and FEI Quanta FE SEM
- EDS Analysis
- QUIZ