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Tescan Vega SEM



Investigation of non-conductive samples is possible in the variable pressure mode and the Oxford EDS detector allows for the characterization of elements in a sample. Surface Texture/roughness, surface profilometry from stereo (stage-tilt or beam tilt) image pairs, using Alicona MeX software.


Source: Tungsten thermionic emission system

Voltage: 200eV-30keV

Beam Current: 1pA to 2µA


  • High Vacuum secondary electron:
    • 3nm at 30keV
    • 8nm at 3keV
  • Low Vacuum backscattered electron and Low Vacuum Secondary Electron TESCAN detector:
    • 3.5nm at 30keV

Magnification: 1x-1,000,000

Field of View: 7.7mm at 10mmWD, 24mm at 30mm WD

Stage: Large analytical chamber with a fully 5-axis motorized stage

  • x=y=130mm
  • z=100mm
  • Tilt=-30° to +90°

Image Size:

  • 16384 x 16384 pixels, adjustable separately for live image (in 3 steps) and for stored images (11 steps)
  • Selectable square or 4:3 or 2:1 rectangle
  • Unlimited large panorama image size (up to storage capacity)

Equipment associated with the Vega includes: SE detector, retractable BSE detector, low vacuum secondary electron TESCAn detector, pA meter, touch alarm, and IR TV camera.

Electron optics working modes:

  • High vacuum mode: includes resolution, depth, field, wide field, and channeling.
  • Low vacuum mode: includes resolution and depth.

For imaging services, training, and questions

please contact Dr. Stanislav Vitha,

Instructions and Other Useful Information

How is the training done:  Tescan_Vega_Training_Policy.pdf

Download the Startup/Operation/Exit Procedures

Using the MIC? Please cite us by our Research Resource ID: RRID: SCR_022128